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Molecular Beam Epitaxy (MBE) System
VEECO GEN 10 MBE for III-Nitride Semiconductors
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VEECO GENXPLOR for Gallium Oxide and Related Materials (Order placed; expected arrival January 2026)
Metal Organic Chemical Vapor Deposition (MOCVD)
Thomas Swan MOCVD for III-Nitride Semiconductors
Microwave Plasma Chemical Vapor Deposition (MPCVD) Systems for Diamond Study
Two MPCVD Systems for Diamond Study (Order placed; expected arrival August 2025)
Optical/Electrical Characterization Tools
Horiba Microspectroscopy System with MicroPL/Raman
(Order placed; expected arrival October 2025)
Keithley 4200 Semiconductor Parameter Analyzer
Keithley 2401 Source Meter
Thorlab Optical Power Meter
StellarNet UV-VIS Spectrometer with Power Meter, and Integrating Sphere
Laser Light Sources with Different Wavelengths Varying from 193nm to 650 nm
Deep Level Transient Spectrometer (DLTS) with Capability for Measurement from 10K to 800K (
Order placed; expected arrival October 2025)
Three Probe Stations with Capability for Measurement from 10K to 1272K
Structural/Optical Characterizations using Facilities in the Material Characterization Center (MCC)
Fourier Transform Infrared (FTIR) Spectroscopy/Infrared (IR) Microscopy, IR and UV spectrophotometers, ellipsometer, nanoinstruments indenter, various metrology tools; Scanning electron microscopy (SEM), Focused Ion & Electron Beam System with Energy Dispersive X-Ray Spectroscopy (FIB-SEM-EDS), Transmission Electron Microscopy with Energy Dispersive X-Ray Spectroscopy (TEM-EDS), Atomic Force Microscopy (MFP-3D-SA AFM), X-ray Photoelectron Spectroscopy (XPS), X-ray Diffractometry (SmartLab 3kW XE), …
https://www.depts.ttu.edu/coe/research/mcc/index.php
Device Fabrication using Facilities in the Nano Tech Center (NTC)
https://www.depts.ttu.edu/ntc/facilities/index.php
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